A phenomenological model of polishing of silicon with...

Tribology International 2010 Vol. 43; Iss. 1-2

A phenomenological model of polishing of silicon with diamond abrasive

Paras M. Agrawal, R. Narulkar, S. Bukkapatnam, L.M. Raff, R. Komanduri
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Volume:
43
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.triboint.2009.05.003
File:
PDF, 628 KB
english, 2010
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