Design optimization of a high-sensitive absolute...

Sensor Review 2014 / 06 Vol. 34; Iss. 3

Design optimization of a high-sensitive absolute micro-pressure sensor

Yu, Zhongliang, Zhao, Yulong, Li, Lili, Li, Cun, Meng, Xiawei, Tian, Bian
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Volume:
34
Language:
english
Journal:
Sensor Review
DOI:
10.1108/sr-09-2013-732
Date:
June, 2014
File:
PDF, 516 KB
english, 2014
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