Very Thin TiO 2 Films Prepared...

Integrated Ferroelectrics 2004 / 01 Vol. 68; Iss. 1

Very Thin TiO 2 Films Prepared by Plasma Enhanced Atomic Layer Deposition (PEALD)

PARK, JOONG-JIN, LEE, WON-JAE, LEE, GEUN-HYOUNG, KIM, IL-SOO, SHIN, BYOUNG-CHUL, YOON, SOON-GIL
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Volume:
68
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580490895815
Date:
January, 2004
File:
PDF, 705 KB
english, 2004
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