Defect Control in Nitrogen Doped Czochralski Silicon...

Solid State Phenomena 1999 Vol. 69-70

Defect Control in Nitrogen Doped Czochralski Silicon Crystals

Ikari, Atsushi, Nakai, Katsuhiko, Tachikawa, Y., Deai, H., Hideki, Y., Ohta, Yasumitsu, Masahashi, N., Hayashi, S., Hoshino, T., Ohashi, W.
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Volume:
69-70
Year:
1999
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.69-70.161
File:
PDF, 572 KB
1999
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