Batch Microfabrication of Metal-Embedded Micro Thin Film...

Electrochemical and Solid-State Letters 2005 Vol. 8; Iss. 11

Batch Microfabrication of Metal-Embedded Micro Thin Film Sensors for Applications in Hostile Environments

Datta, A., Choi, H. S., Cheng, X., Li, X.
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Volume:
8
Year:
2005
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2041328
File:
PDF, 308 KB
english, 2005
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