Retaining Ring Design Impact on CMP Process Stability and...

MRS Proceedings 2010 / 1 Vol. 1249

Retaining Ring Design Impact on CMP Process Stability and Optimization

Smith, Joseph, Wargo, Christopher, Kakireddy, Raghava, Singh, Rakesh, Galpin, Andrew, Philipossian, Ara, Wei, Xiaomin, Bennedine, Karim, Reversat, Claude, Chabourel, Alain
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Volume:
1249
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1249-E02-01
Date:
January, 2010
File:
PDF, 441 KB
english, 2010
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