Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2008 Vol. 26; Iss. 3
Effect of substrate temperature on structural and electrical properties of liquid-delivery metal organic chemical vapor deposited indium oxide thin films on silicon
Venkat, S., Pammi, N., Sahu, B. S., Seong, Nak-Jin, Yoon, Soon-GilVolume:
26
Year:
2008
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2905238
File:
PDF, 1.11 MB
english, 2008