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Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control
Yoshitomi, Kenichiro, Une, Atsunobu, Mochida, MasaakiVolume:
257-258
Year:
2004
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.257-258.429
File:
PDF, 340 KB
english, 2004