SOL Thinning Effects on 3C-SiC on SOI*

Planes, N., Möller, H., Camassel, Jean, Stoimenos, Y., Falkovski, L., Eickhoff, M., Krötz, G.

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Volume:

338-342

Year:

2000

Language:

english

Journal:

Materials Science Forum

DOI:

10.4028/www.scientific.net/MSF.338-342.301

File:

PDF, 343 KB

english, 2000

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