Liquid-phase-deposited high dielectric zirconium oxide for metal-oxide-semiconductor high electron mobility transistors
Hu, Chih-Chun, Chiu, Chu-An, Yu, Chien-Hua, Xu, Jian-Xuan, Wu, Tsu-Yi, Sze, Po-Wen, Wu, Chang-Luen, Wang, Yeong-HerVolume:
118
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2015.01.012
Date:
August, 2015
File:
PDF, 1.50 MB
english, 2015