As-Implanted Lattice Sites of Dopants in Semiconductors

Hofsäss, H., Lindner, G., Winter, S., Besold, B., Recknagel, E., Weyer, G., Petersen, J.W.

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Volume:

10-12

Year:

1986

Journal:

Materials Science Forum

DOI:

10.4028/www.scientific.net/MSF.10-12.1183

File:

PDF, 319 KB

1986

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