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As-Implanted Lattice Sites of Dopants in Semiconductors
Hofsäss, H., Lindner, G., Winter, S., Besold, B., Recknagel, E., Weyer, G., Petersen, J.W.Volume:
10-12
Year:
1986
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.10-12.1183
File:
PDF, 319 KB
1986