Dose Dependence of Defects in Silicon Produced by High...

Dose Dependence of Defects in Silicon Produced by High Dose, High Temperature O+ Implantation

Hobbs, A., Barklie, R.C., Reeson, K.J., Hemment, P.L.F.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
10-12
Year:
1986
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.10-12.1159
File:
PDF, 283 KB
1986
Conversion to is in progress
Conversion to is failed