Infrared spectroscopic ellipsometry applied to the...

Infrared spectroscopic ellipsometry applied to the characterization of nano-structures of silicon IC manufacturing

P Boher, M Bucchia, C Guillotin, C Defranoux
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Volume:
450
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2003.10.066
File:
PDF, 350 KB
english, 2004
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