Microscopic investigations of chemo-mechanical polishing of...

Thin Solid Films 2004 Vol. 457; Iss. 2

Microscopic investigations of chemo-mechanical polishing of tungsten

Min Soo Lim, Paul A.W. van der Heide, Scott S. Perry, Heather C. Galloway, Deborah C. Koeck
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Volume:
457
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2003.11.301
File:
PDF, 548 KB
english, 2004
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