Thickness determination for SiO2 films on Si by X-ray...

Thickness determination for SiO2 films on Si by X-ray reflectometry at the Si K edge

M Krumrey, M Hoffmann, G Ulm, K Hasche, P Thomsen-Schmidt
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Volume:
459
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2003.12.100
File:
PDF, 138 KB
english, 2004
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