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Self-consistent modelling of plasma–solid interaction in electronegative plasmas
Rudolf Hrach, Dalibor Sedlák, Miroslav Vicher, Jiřı́ ŠimekVolume:
459
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2003.12.116
File:
PDF, 107 KB
english, 2004