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Microstructure of amorphous tantalum nitride thin films
S. Tsukimoto, M. Moriyama, Masanori MurakamiVolume:
460
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.01.073
File:
PDF, 1021 KB
english, 2004