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The effects of deposition and test conditions on nanomechanical behaviour of ultrathin films produced by plasma-enhanced chemical vapour deposition process at atmospheric pressure
Zygmunt Rymuza, Maciej Misiak, Zenobia Rzanek-Boroch, Krzysztof Schmidt-Szałowski, Jadwiga JanowskaVolume:
466
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2004.02.050
File:
PDF, 1.05 MB
english, 2004