Formation of thin β-FeSi2 template layer for the epitaxial...

Thin Solid Films 2004 Vol. 461; Iss. 1

Formation of thin β-FeSi2 template layer for the epitaxial growth of thick film on Si (111) substrate

Ryo Kuroda, Zhengxin Liu, Yasuhiro Fukuzawa, Yasuhito Suzuki, Masato Osamura, Shinan Wang, Naotaka Otogawa, Teruhisa Ootsuka, Takahiro Mise, Yasushi Hoshino, Yasuhiko Nakayama, Hisao Tanoue, Yunosuke
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Volume:
461
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.02.055
File:
PDF, 1.01 MB
english, 2004
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