Formation of SiGe/β-FeSi2 superstructures from amorphous...

Thin Solid Films 2004 Vol. 461; Iss. 1

Formation of SiGe/β-FeSi2 superstructures from amorphous Si/FeSiGe layers

T Sadoh, M Owatari, Y Murakami, A Kenjo, T Yoshitake, M Itakura, T Enokida, M Miyao
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Volume:
461
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2004.02.068
File:
PDF, 423 KB
english, 2004
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