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Nucleation and growth during the atomic layer deposition of W on Al2O3 and Al2O3 on W
R.K. Grubbs, C.E. Nelson, N.J. Steinmetz, S.M. GeorgeVolume:
467
Year:
2004
Language:
english
Pages:
12
DOI:
10.1016/j.tsf.2004.02.099
File:
PDF, 614 KB
english, 2004