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Structural properties of d.c. magnetron sputtered B–C–N thin films and correlation to their mechanical properties: a new empirical formula
V. Linss, J. Barzola-Quiquia, P. Häussler, F. RichterVolume:
467
Year:
2004
Language:
english
Pages:
10
DOI:
10.1016/j.tsf.2004.03.008
File:
PDF, 1.18 MB
english, 2004