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Influence of process parameters on the characteristics of indium zinc oxide thin films deposited by DC magnetron sputtering
Young Soo Song, Jung Koo Park, Tae Wan Kim, Chee Won ChungVolume:
467
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2004.03.023
File:
PDF, 549 KB
english, 2004