Nanometer-sized patterning of polysilicon thin films by...

Nanometer-sized patterning of polysilicon thin films by high density plasma etching

Young Soo Song, Jung Woo Kim, Chee Won Chung
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Volume:
467
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2004.03.025
File:
PDF, 468 KB
english, 2004
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