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Comparison of visible photoluminescence from Si ion-irradiated SiO2/Si/SiO2 films fabricated by ion beam sputtering deposition and electron beam evaporation
H.B. Kim, J.H. Son, C.N. Whang, K.H. ChaeVolume:
467
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.03.033
File:
PDF, 401 KB
english, 2004