Quaternary hard nanocomposite TiCxNy/SiCN coatings prepared by plasma enhanced chemical vapor deposition
P. Jedrzejowski, J.E. Klemberg-Sapieha, L. MartinuVolume:
466
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2004.03.043
File:
PDF, 557 KB
english, 2004