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Effect of heat treatment on structural, optical and mechanical properties of sputtered TiOxNy films
S.H. Mohamed, O. Kappertz, T. Niemeier, R. Drese, M.M. Wakkad, M. WuttigVolume:
468
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2004.04.017
File:
PDF, 470 KB
english, 2004