![](/img/cover-not-exists.png)
Effect of substrate temperature on structure and intrinsic stress in vapor-deposited amorphous silicon carbide film
Ju-Young Kim, Baik-Woo Lee, Ho-Seok Nam, Dongil KwonVolume:
467
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.04.030
File:
PDF, 505 KB
english, 2004