Effect of substrate temperature on structure and intrinsic...

Effect of substrate temperature on structure and intrinsic stress in vapor-deposited amorphous silicon carbide film

Ju-Young Kim, Baik-Woo Lee, Ho-Seok Nam, Dongil Kwon
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Volume:
467
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.04.030
File:
PDF, 505 KB
english, 2004
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