A model for the behaviour of tensile and compressive...

A model for the behaviour of tensile and compressive residual stresses developed in thin films produced by ion beam-assisted deposition techniques

G. Knuyt
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Volume:
467
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2004.04.050
File:
PDF, 245 KB
english, 2004
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