Temperature dependence of the optical functions of amorphous silicon-based materials: application to in situ temperature measurements by spectroscopic ellipsometry
D. Daineka, V. Suendo, P. Roca i CabarrocasVolume:
468
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.05.011
File:
PDF, 248 KB
english, 2004