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Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator
Kerdlapee, Pongsak, Wisitsoraat, Anurat, Leksakul, K., Phokharatkul, D., Phatthanakun, R., Tuantranont, AdisornVolume:
254
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.254.66
Date:
May, 2011
File:
PDF, 574 KB
english, 2011