Effects on surface morphology of epitaxial Y2O3 layers on...

Thin Solid Films 2004 Vol. 468; Iss. 1-2

Effects on surface morphology of epitaxial Y2O3 layers on Si (001) after postgrowth annealing

V. Ioannou-Sougleridis, V. Constantoudis, M. Alexe, R. Scholz, G. Vellianitis, A. Dimoulas
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Volume:
468
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2004.05.076
File:
PDF, 692 KB
english, 2004
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