Yield Property Characterization for Au and TiN Thin Films...

Key Engineering Materials 2006 Vol. 326-328

Yield Property Characterization for Au and TiN Thin Films by Applying Nanoindentation Technique

Lee, Yun Hee, Huh, Yong Hak, Kim, Ju Young, Nahm, Seung Hoon, Jang, Jae Il, Kwon, Dong Il
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Volume:
326-328
Year:
2006
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.326-328.215
File:
PDF, 874 KB
english, 2006
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