The effect of Sb surfactant assisted growth on SiGe surface...

The effect of Sb surfactant assisted growth on SiGe surface morphology

Glenn G. Jernigan, Phillip E. Thompson
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Volume:
472
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2004.05.117
File:
PDF, 222 KB
english, 2005
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