Synthesis of conical Si array on Si(100) for a field...

Thin Solid Films 2004 Vol. 464-465; Iss. none

Synthesis of conical Si array on Si(100) for a field electron emitter by plasma-enhanced chemical vapor deposition

Kuei-Yi Lee, Shin-ichi Honda, Mitsuhiro Katayama, Takashi Kuzuoka, Yang-Gyu Baek, Shigeharu Ohkura, Katsunori Aoki, Takashi Hirao, Kenjiro Oura
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Volume:
464-465
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.06.018
File:
PDF, 384 KB
english, 2004
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