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Correlation between the dielectric constant and X-ray diffraction pattern of Si-O-C thin films with hydrogen bonds
Teresa Oh, Kyoung Suk Oh, Kwang-Man Lee, Chi Kyu ChoiVolume:
468
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.06.089
File:
PDF, 1.02 MB
english, 2004