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Property change in ZrNxOy thin films: effect of the oxygen fraction and bias voltage
F. Vaz, P. Carvalho, L. Cunha, L. Rebouta, C. Moura, E. Alves, A.R. Ramos, A. Cavaleiro, Ph. Goudeau, J.P. RivièreVolume:
469-470
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2004.06.191
File:
PDF, 488 KB
english, 2004