Fabrication of Si nano-pillar array through Ni nano-dot...

Thin Solid Films 2005 Vol. 475; Iss. 1-2

Fabrication of Si nano-pillar array through Ni nano-dot mask using inductively coupled plasma

Mun Ja Kim, Jin Seung Lee, Seong Kyu Kim, G.Y. Yeom, Ji-Beom Yoo, Chong-Yun Park
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Volume:
475
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2004.07.026
File:
PDF, 340 KB
english, 2005
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