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The effect of RF power on tribological properties of the diamond-like carbon films
Won Seok Choi, Jinhee Heo, Ilsub Chung, Byungyou HongVolume:
475
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2004.07.033
File:
PDF, 407 KB
english, 2005