The formation of thick buried oxide layers using ion implantation from water plasma
Jing Chen, Xi Wang, Yemin Dong, Xiang Wang, Wanbing Yi, Zhihong Zheng, Zixin LinVolume:
472
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2004.07.053
File:
PDF, 438 KB
english, 2005