Structural study of a low dielectric thin film using X-ray reflectivity and grazing incidence small angle X-ray scattering
C.-H. Hsu, U-Ser Jeng, Hsin-Yi Lee, Chih-Mon Huang, K.S. Liang, D. Windover, T.-M. Lu, C. JinVolume:
472
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.07.062
File:
PDF, 368 KB
english, 2005