Deposition of c-BN on silicon substrates coated with...

Deposition of c-BN on silicon substrates coated with diamond thin films

Qi He, Chengming Li, Craig Frankel, Lawrence Pilione, Bill Drawl, Fanxiu Lu, Russell Messier
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Volume:
474
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2004.08.018
File:
PDF, 489 KB
english, 2005
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