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Spatially resolved optical emission studies of pulsed D.C. plasmas for TiN deposition by unbalanced magnetron sputtering
Soo-ghee Oh, Yong-mo Kim, Jeon-gun HanVolume:
475
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.08.034
File:
PDF, 593 KB
english, 2005