The etching properties of MgO thin films in Cl2/Ar gas...

Thin Solid Films 2005 Vol. 475; Iss. 1-2

The etching properties of MgO thin films in Cl2/Ar gas chemistry

Sung-Mo Gu, Dong-Pyo Kim, Kyoung-Tae Kim, Chang-Il Kim
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Volume:
475
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.08.037
File:
PDF, 316 KB
english, 2005
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