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Integration of stacked capacitor module with ultra-thin ferroelectric SrBi2Ta2O9 film for high density ferroelectric random access memory applications at low voltage operation
Manfred Moert, Thomas Mikolajick, Guenther Schindler, Nicolas Nagel, Igor Kasko, Walter Hartner, Christine Dehm, Hermann Kohlstedt, Rainer WaserVolume:
473
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2004.08.087
File:
PDF, 539 KB
english, 2005