Production of AlN films: ion nitriding versus PVD coating

Production of AlN films: ion nitriding versus PVD coating

U. Figueroa, O. Salas, J. Oseguera
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Volume:
469-470
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2004.08.129
File:
PDF, 555 KB
english, 2004
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