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Boron–carbide barrier layers in scandium–silicon multilayers
A.F. Jankowski, C.K. Saw, C.C. Walton, J.P. Hayes, J. NilsenVolume:
469-470
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.08.153
File:
PDF, 223 KB
english, 2004