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Study on etching profile of nanoporous silica
C.W. Chen, T.C. Chang, P.T. Liu, T.M. Tsai, H.H. Wu, T.Y. TsengVolume:
469-470
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.08.154
File:
PDF, 396 KB
english, 2004