Crystallization of indium tin oxide thin films prepared by...

Thin Solid Films 2005 Vol. 474; Iss. 1-2

Crystallization of indium tin oxide thin films prepared by RF-magnetron sputtering without external heating

Ju-O Park, Joon-Hyung Lee, Jeong-Joo Kim, Sang-Hee Cho, Young Ki Cho
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Volume:
474
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.08.172
File:
PDF, 883 KB
english, 2005
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