Study on the effect of electron beam curing on low-K porous organosilicate glass (OSG) material
T.C. Chang, T.M. Tsai, P.T. Liu, C.W. Chen, T.Y. TsengVolume:
469-470
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.08.178
File:
PDF, 527 KB
english, 2004